Test item

Technical index

Appearance (normal temperature and pressure)

Colorless or light yellow volatile liquid

Silicon tetrachloride，W/% ≥

99.50

Chlorosilane polymer，W/% ≤

0.10

Methyltrichlorosilane，W/%≤

0.10

Fe,Al,Cr,Ti,Cu,Mn,Ni,total quantity/（mg/g)

0.10

B/（mg/g)

0.50

P/（mg/g)

0.10