Molecular formula:SiHCl3
Molecular weight:135.44
Item |
Index |
|||||
Class I |
Class II |
|||||
Superior product |
First grade goods |
Qualified product |
Superior product |
First grade goods |
Qualified product |
|
Trichlorosilane > |
99.8 |
99.5 |
99.0 |
99.5 |
99.0 |
98.5 |
Dichlorodihydrosilane w/% < |
0.05 |
0.20 |
0.30 |
0.10 |
0.20 |
0.50 |
Silicon tetrachloride w/% < |
0.15 |
0.20 |
0.50 |
0.20 |
0.50 |
0.70 |
Chlorosilane polymer w/% < |
0.05 |
0.10 |
0.30 |
0.05 |
0.10 |
0.30 |
Al/(ng/g) < |
50 |
100 |
200 |
- |
- |
- |
P/(ng/g) < |
20 |
30 |
50 |
- |
- |
- |
Fe、Cr、Cu、Zn Total quantity//(ng/g) < |
200 |
300 |
500 |
- |
- |
- |
B、Ga、In Total quantity /(ng/g) < |
50 |
100 |
200 |
- |
- |
- |
Total carbon (in C)/(μg/g) < |
200 |
- |
- |
- |