Trichlorosilane


Molecular formula:SiHCl3

Molecular weight:135.44

Item

Index

Class I

Class II

Superior product

First grade goods

Qualified product

Superior product

First grade goods

Qualified product

Trichlorosilane >

99.8

99.5

99.0

99.5

99.0

98.5

Dichlorodihydrosilane w/% <

0.05

0.20

0.30

0.10

0.20

0.50

Silicon tetrachloride w/% <

0.15

0.20

0.50

0.20

0.50

0.70

Chlorosilane polymer w/% <

0.05

0.10

0.30

0.05

0.10

0.30

Al/(ng/g) <

50

100

200

-

-

-

P/(ng/g) <

20

30

50

-

-

-

Fe、Cr、Cu、Zn Total quantity//(ng/g) <

200

300

500

-

-

-

B、Ga、In Total quantity /(ng/g) <

50

100

200

-

-

-

Total carbon (in C)/(μg/g) <

200

-

-

-





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